Force Balance and Error Suppress OF Vibrating Silicon Micro-gyroscope

Micro vibrating ring gyroscope is a two-dimensional axisymmetric structure solid fluctuation gyroscope that evolved from a three-dimensional hemispherical resonant gyroscope. On the premise of inheriting the characteristics of hemispherical resonant gyroscope such as high accuracy, high reliability, long life, and overload resistance, it is compatible with the current mainstream MEMS processing technology, and thus has better CSWaP, and has an extensive application prospect. Therefore, the vibration ring gyroscope has become one of the research hotspots of MEMS gyroscope.